DESIGN AND SIMULATION OF FLEXIBLE MEMS INTERDIGITAL CAPACITOR FOR ENERGY STORAGE SYSTEMS

S Sathya, S Muruganand, M Pavithra

Abstract


In this research work an actuation mechanism based on the micro electromechanical systems interdigital capacitor (IDC) for flexible substrate. This IDC model is one of the basic model which uses the principle of electrostatic and force can be generated for the capacitive sensors

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