Design, Fabrication and Testing of Flexure Mechanism

Abstract

Flexure Mechanism is a recent development in the field of MEMS designing. It is a single-piece mechanism that transfers motion without any relative motion between joints or linkages, thus causing no friction or hysteresis loss. The design of a mechanism having flexural bending at the linkages methods for modelling and designing compliant mechanisms has spurred their use in a variety of products, ranging from macro-scale products such as clutches, guides, and switches, to micro-electromechanical systems (MEMS). This mechanisms offer a number of advantages, such as increased precision, reduced friction and wear, simple construction, and reduced assembly. In many ways this mechanisms have developed. Similar functionality to rigid mechanisms. Compliant mechanisms have the potential to completely eliminate relative motion between linkages, and thus eliminate friction