Fabrication of Nanometer Features on Conductive Surfaces Using Electrostatic Spark Discharges

Abstract

This study demonstrates the feasibility of using a localized plasma discharge from       an atomically sharp tip to produce nanometer-scale craters, holes, and      mounds on conducting surfaces. It           further discusses  the  potential application of such an approach for nanolithography, nanoimprinting, production of masks for nanostenciling, and the fabrication of membranes.

Key Words: Nano-features; Electrostatic; Discharge;  Inchworm