Behaviors and Characteristics Study of the Electron Beam for Lens System in a Scanning Electron Microscope

Abstract

This work aims to study the behaviors and characteristics of the electron beam within the optical column in a thermionic scanning electron microscope (SEM)and the focusing capability using a numerical computation and an optics-based calculation.  The beam spot size is estimated by theoretical calculation.  Investigate the SEM performance for various design parameters through a numerical analysis and an optics-based calculation, a combination of two approaches gives more detailed information